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0010-02905

Blade Assy, P 500, Robot, 200mm (as is)

0010-20679

???

0010-76491

5-Phase Stepping Motor (as is)

0020-01999

Block, 300mm Magnet Holder E Zon, W/Magnet

0020-23045

Shield Lower (used) Metal part

0021-09759

Face Plate, Ceramic

0021-24738

Seal Plug

0040-07445

Liner Cathode Direct Cooled, 300mm, E Max

0040-35433

Assy, Metals

0190-09398

Susepter Assy

0200-00216

Cover Ring, Qtz

0200-00331

Ring, Singl, Ceramic ESC, 200mm JMF, Low CE

0200-00589

Ceramic Rings

0200-00677

Shadow Ring, Qtz, Flat 200mm, Flat (new)

0200-00934

Viewport, Qtz, SWLL, 300mm (new)

0200-01057

Qtz Lid Liner, 300mm

0200-01058

Liner, Qtz, 300mm (used) Coated AL2, 02s

0200-01059

Liner, Qtz, 300mm (used)

0200-01061

Ceramic Ring

0200-01061

Lid Isolator, Ceramic, 300mm (used)

0200-01080

Deposition Ring, 300mm, Ceramic (new)

0200-01123

Qtz, 300mm, Robot Blade (new)

0200-01589

A-Liner-Common, 300mm Qtz

0200-01591

C-Liner-Ti, Qtz 300mm

0200-01745

Lid Isolator Top, 300mm, TIC 14 (ceramic)

0200-01746

Lid Isolator Bottom, 300mm, TIC 14 (ceramic)

0200-01807

Lid Isolator Bottom, 300mm, TIC 14 (ceramic)

0200-02925

Insulator, Qtz #1 300mm

0200-09895

Focus Ring, 200mm

0200-18077

Cover Process Ultima Cer. (New) 200mm

0200-35692

Robot Blade, Qtz, 200mm (new)

0200-35768

Window Cover Plate, 300mm, Qtz

0200-35975

Ceramic, Lid Liner 200mm

0200-35979

Common Chamber, Bottom Heat Shield, 200mm (new)

0200-36034

Insulator, Qtz, 300mm Simple CA (new)

0200-36525

Plate Cover, Qtz, 200mm (used)

0200-36541

Ceramic Lid Liner, 300mm

0200-36544

Lid Isolator for Non-Clamp Lid Ceramic Plate, 200mm

0200-76045

Cover, Cooldown Viewport, Qtz 300mm

0220-41919

Assy, Hose Conector, 300mm ETCH

0224-41946

Assy, Hose Conector, 300mm ETCH

0227-43732

Hose, 300mm ETCH

3750-01144

Tube Sapphire Replacement Kit

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