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| EESI PART # |
Compare to
OEM PART # |
MATERIAL |
SYSTEM |
DESCRIPTION |
|
2900-00001
|
0010-30057
|
Al 6061-T6
|
Etcher
|
Cathode Liner MXP
|
|
2900-00002
|
0015-09055
|
|
|
Bellows
|
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2900-00003
|
0015-09056
|
|
|
Bellows
|
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2900-00004
|
0020-01271
|
Al 6061
|
CVD
|
Pumping Plate WxZ+/CxZ
|
|
2900-00005
|
0020-04267
|
Al 6061
|
Endura
|
Thin Ring
|
|
2900-00006
|
0020-04319
|
Al 6061
|
Endura
|
Liner Throttle Valve
|
|
2900-00007
|
0020-05326
|
Al 6061
|
CVD
|
Baffle Clean Port ULTIMA
|
|
2900-00008
|
0020-07718
|
Al 6061
|
Endura
|
Cover Ring Preclean II
|
|
2900-00009
|
0020-10117
|
Al 6061
|
CVD
|
Perf Plate TESO
|
|
2900-00010
|
0020-10402
|
Al 6061
|
CVD
|
Pumping Plate
|
|
2900-00011
|
0020-10519
|
Al 6061-T6
|
Etcher
|
Pedestal 6"
|
|
2900-00012
|
0020-18367
|
Monel 400
|
CVD
|
Screw Slotted
|
|
2900-00013
|
0020-18513
|
Al 6061
|
CVD
|
Diffuser Clean Port ULTIMA
|
|
2900-00014
|
0020-18715
|
Al 6061
|
CVD
|
Insert Chamber Slit Valve ULTIMA
|
|
2900-00015
|
0020-19002
|
Al 6061-T6
|
Etcher
|
Slit Valve Plate MXP
|
|
2900-00016
|
0020-19003
|
Al 6061-T6
|
Etcher
|
Slit Door Liner MXP
|
|
2900-00017
|
0020-20112
|
SUS304
|
Endura
|
Clamp Ring 8"
|
|
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