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Parts & Logistics Services - Axcelis 

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EESI PART # Compare to
OEM PART #
MATERIAL DESCRIPTION

1800-00001

17208240

 

TE Aaperature

1800-00002

17164510

 

TE Insulator

1800-00003

17174410

 

TE Insulator

1800-00004

392171

Sapphire

Sapphire Tube

1800-00005

47402

Quartz

Quartz Lenz UV Backed

1800-00006

412961

 

Disk Sapphire

1800-00007

405241

Quartz

Heater Window/Lower Quartz Plate

1800-00008

405241

Sapphire Coated

Heater Window/Quartz Plate Lower Sapphire Coated

1800-00009

396041

Quartz

 

 
 
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Last updated: March 2010