| Parts & Logistics
Services - Lam 2 |
Manufacturers List
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|
| EESI PART # |
Compare to
OEM PART # |
MATERIAL |
SYSTEM |
DESCRIPTION |
|
2800-00018 |
715-011640-006 |
|
4420 |
Fing, Focus Anodized (Semi 6") |
|
2800-00019 |
715-018991-206 |
|
4420 |
Upper Electrode |
|
2800-00020 |
715-330825-007 |
Refurbished only |
9600PTX |
BSR Chamber Liner |
|
2800-00021 |
718-094523-261 |
|
|
ESC Chuck 6" |
|
2800-00022 |
716-011533-001 |
NSG OZ |
|
NSG-OZ Quartz Window |
|
2800-00023 |
716-008645-001 |
Quartz |
|
Cover Ring Quartz HP |
|
2800-00024 |
715-011531-008 |
Aluminum |
|
Electrode Aluminum Anodized |
|
2800-00025 |
715-011531-009 |
Aluminum |
|
Electrode Aluminum Anodized |
|
2800-00026 |
715-009657-001 |
|
|
Ring Outer Anodized |
|
2800-00027 |
716-160255-0001 |
Quartz |
|
Bell Jar Sleeve Quartz ISO CH 4500 |
|
2800-00028 |
716-011009-001 |
Quartz |
|
Window Quartz |
|
2800-00030 |
716-011427-001 |
Quartz |
|
DSQ Quartz Window |
|
2800-00031 |
716-011493-001 |
Quartz |
|
DSQ Quartz Spacer |
|
2800-00032 |
716-021323-001 |
Quartz |
|
Funnel Quartz Power Supply Module |
|
2800-00033 |
716-028454-012 |
Quartz |
|
Disk Quartz |
|
2800-00034 |
716-028454-012 |
Quartz |
|
Disk Quartz |
|
2800-00035 |
716-031052-001 |
Quartz |
|
Window Qtz Htd. Endpoint |
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