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| EESI PART # |
Compare to
OEM PART # |
MATERIAL |
SYSTEM |
DESCRIPTION |
|
2800-00018
|
715-011640-006
|
|
4420
|
Fing, Focus Anodized (Semi 6")
|
|
2800-00019
|
715-018991-206
|
|
4420
|
Upper Electrode
|
|
2800-00020
|
715-330825-007
|
Refurbished only
|
9600PTX
|
BSR Chamber Liner
|
|
2800-00021
|
718-094523-261
|
|
|
ESC Chuck 6"
|
|
2800-00022
|
716-011533-001
|
NSG OZ
|
|
NSG-OZ Quartz Window
|
|
2800-00027
|
716-160255-0001
|
Quartz
|
|
Bell Jar Sleeve Quartz ISO CH 4500
|
|
2800-00028
|
716-011009-001
|
Quartz
|
|
Window Quartz
|
|
2800-00030
|
716-011427-001
|
Quartz
|
|
DSQ Quartz Window
|
|
2800-00031
|
716-011493-001
|
Quartz
|
|
DSQ Quartz Spacer
|
|
2800-00032
|
716-021323-001
|
Quartz
|
|
Funnel Quartz Power Supply Module
|
|
2800-00033
|
716-028454-012
|
Quartz
|
|
Quartz Disk EESI Style
|
|
2800-00034
|
716-028454-012
|
Quartz
|
|
Disk Quartz Lam Style
|
|
2800-00035
|
716-031052-001
|
Quartz
|
|
Window Qtz Htd. Endpoint
|
|
2800-00036
|
716-140236-003
|
Quartz
|
|
Consignment Ring
|
|
2800-00037
|
716-330504-065
|
Ceramic
|
|
Focus Ring Ceramic
|
|
2800-00038
|
716-051609-003
|
Quartz
|
|
Spacer Heater (4P in Arry)
|
|
2800-00039
|
716-021717-001
|
Quartz
|
|
Bell Jar Sleeve Quartz
|
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