| Parts & Logistics Services
- Lam |
Manufacturers List |
back
|
|
| EESI PART # |
Compare to
OEM PART # |
MATERIAL |
SYSTEM |
DESCRIPTION |
|
2800-00040
|
716-021717-002
|
Quartz
|
|
Bell Jar Sleeve Quartz
|
|
2800-00041
|
713-028487-001
|
Vespel
|
|
Vespel Confinement Ring
|
|
2800-00042
|
716-012639-024
|
Quartz
|
|
Noz, Inj. 3X .055-45 Deg RD
|
|
2800-00043
|
716-012640-011
|
Quartz
|
|
Window Gas Inj. Face Seal, Qtz, NSG
|
|
2800-00044
|
716-012640-012
|
Quartz
|
|
Window Gas Inj. Face Seal, QR
|
|
2800-00045
|
716-013344-001
|
Quartz
|
|
Ring Cover Outer GND
|
|
2800-00046
|
716-013402-003
|
Quartz
|
|
Qover H/E Ring Quartz
|
|
2800-00047
|
716-014843-001
|
Quartz
|
|
6 Ring WAP Qtz Generic 17" DFC 300mm
|
|
2800-00048
|
715-023013-004
|
Silicon?
|
|
Ring Hot Edge SiDFC 300mm Flex
|
|
2800-00049
|
716-331142-305
|
|
|
Top Edge Ring
|
|
2800-00050
|
716-801306-009
|
Quartz
|
|
Quartz Disk
|
|
2800-00051
|
716-801451-019
|
Quartz
|
|
Baffle Chamber 2300 MW Stripper U
|
|
2800-00052
|
716-802779-009
|
Quartz
|
|
Gas Injector
|
|
2800-00053
|
716-140236-062
|
|
|
|
|
2800-00054
|
716-330891-002
|
|
|
|
|
2800-00055
|
716-000941-001
|
|
|
|
|
2800-00056
|
716-330355-001
|
|
|
|
|
2800-00057
|
716-330355-001
|
|
|
|
|
|
|
|
|
|
Manufacturers
List | back |