| Parts - Lam 3 |
Manufacturers List
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|
| EESI PART # |
Compare to
OEM PART # |
MATERIAL |
SYSTEM |
DESCRIPTION |
|
2800-00036 |
716-140236-003 |
Quartz |
|
Consignment Ring |
|
2800-00037 |
716-330504-065 |
Ceramic |
|
Focus Ring Ceramic |
|
2800-00038 |
716-051609-003 |
Quartz |
|
Spacer Heater (4P in Arry) |
|
2800-00039 |
716-021717-001 |
Quartz |
|
Bell Jar Sleeve Quartz |
|
2800-00040 |
716-021717-002 |
Quartz |
|
Bell Jar Sleeve Quartz |
|
2800-00041 |
713-028487-001 |
Vespel |
|
Vespel Confinement Ring |
|
2800-00042 |
716-012639-024 |
Quartz |
|
Noz, Inj. 8X .055-45 Deg RD |
|
2800-00043 |
716-012640-011 |
Quartz |
|
Window Gas Inj. Face Seal, Qtz, NSG |
|
2800-00044 |
716-012640-012 |
Quartz |
|
Window Gas Inj. Face Seal, QR |
|
2800-00045 |
716-013344-001 |
Quartz |
|
Ring Cover Outer GND |
|
2800-00046 |
716-013402-003 |
Quartz |
|
Qover H/E Ring Quartz |
|
2800-00047 |
716-014843-001 |
Quartz |
|
6 Ring WAP Qtz Generic 17" DFC 300mm |
|
2800-00048 |
715-023013-004 |
Silicon? |
|
Ring Hot Edge SiDFC 300mm Flex |
|
2800-00049 |
716-331142-305 |
|
|
Top Edge Ring |
|
2800-00050 |
716-801306-009 |
Quartz |
|
Quartz Disk |
|
2800-00051 |
716-801451-019 |
Quartz |
|
Baffle Chamber 2300 MW Stripper U |
|
2800-00052 |
716-802779-009 |
Quartz |
|
Gas Injector |
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