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Parts - Tegal 

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EESI PART # Compare to
OEM PART #
SYSTEM DESCRIPTION

2000-00001

37-221-001

Tegal 1903E

Upper Electrode

2000-00002

37-221-003

Tegal 1903E

Upper Electrode

2000-00003

40-788-616

Tegal 901E

Centering ESC 6" Bnded Genhre

2000-00004

39-680-003

 

Electrode Conehead

2000-00005

40-140-001

 

RING INSUL CER

2000-00006

40-140-003

 

RING INSUL CER 99.5

2000-00007

40-395-001

 

RING, FLAT 6" CERAMIC

2000-00008

40-395-001

 

RING 6" CASTELLATED W/ FLAT CUTAWAY

2000-00009

40-395-002

 

Ring, Ceramic, 125C, Castellated

2000-00010

40-395-003

 

RING 4" CASTELLATED W/ FLAT CUTAWAY

2000-00011

40-575-003-C

 

Ring, Ceramic Nest, Flat Ring

2000-00012

40-576-003-C

 

Ring Ceramic Focus, Castellated

2000-00013

39-344-002

Tegal 901

Showerhead

2000-00014

40-395-001

 

 

2000-00015

40-788-616

 

 

2000-00016

40-869-002

 

 

2000-00017

80-202-357

O-Ring

O-Ring

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Last updated: March 2014