| Parts - Tegal |
Manufacturers List | next>>>
|
|
| EESI PART # |
Compare to
OEM PART # |
SYSTEM |
DESCRIPTION |
|
2000-00001
|
37-221-001
|
Tegal 1903E
|
Upper Electrode
|
|
2000-00002
|
37-221-003
|
Tegal 1903E
|
Upper Electrode
|
|
2000-00003
|
40-788-616
|
Tegal 901E
|
Centering ESC 6" Bnded Genhre
|
|
2000-00004
|
39-680-003
|
|
Electrode Conehead
|
|
2000-00005
|
40-140-001
|
|
RING INSUL CER
|
|
2000-00006
|
40-140-003
|
|
RING INSUL CER 99.5
|
|
2000-00007
|
40-395-001
|
|
RING, FLAT 6" CERAMIC
|
|
2000-00008
|
40-395-001
|
|
RING 6" CASTELLATED W/ FLAT CUTAWAY
|
|
2000-00009
|
40-395-002
|
|
Ring, Ceramic, 125C, Castellated
|
|
2000-00010
|
40-395-003
|
|
RING 4" CASTELLATED W/ FLAT CUTAWAY
|
|
2000-00011
|
40-575-003-C
|
|
Ring, Ceramic Nest, Flat Ring
|
|
2000-00012
|
40-576-003-C
|
|
Ring Ceramic Focus, Castellated
|
|
2000-00013
|
39-344-002
|
Tegal 901
|
Showerhead
|
|
2000-00014
|
40-395-001
|
|
|
|
2000-00015
|
40-788-616
|
|
|
|
2000-00016
|
40-869-002
|
|
|
|
2000-00017
|
80-202-357
|
O-Ring
|
O-Ring
|
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Last updated: May 2102 |
