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Parts & Logistics Services - Ulvac 

Manufacturers List
EESI PART # Compare to
OEM PART #		 MATERIAL DESCRIPTION

2100-00001

1014896

Sapphire

Viewport EPD

2100-00002

1016689

Quartz

GDS-Shield

2100-00003

1016698

Quartz

Bottom Ring

2100-00004

1018517

Quartz

Baffle

2100-00005

1018518

Quartz

Top Ring 2 Sections

2100-00006

1019020

Quartz

Top Plate

2100-00007

101980/1016783

Quartz

Bottom Plate (Combined Parts)
 
 
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Last updated: April 2008