Enoch Engineering Services, Inc.

Enoch Engineering Services Inc.

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Parts - Ulvac			Manufacturers List	search Enoch Engineering
EESI PART #		Compare to OEM PART #	MATERIAL	DESCRIPTION
2100-00001		1014896	Sapphire	Viewport EPD
2100-00002		1016689	Quartz	GDS-Shield
2100-00003		1016698	Quartz	Bottom Ring
2100-00004		1018517	Quartz	Baffle
2100-00005		1018518	Quartz	Top Ring 2 Sections
2100-00006		1019020	Quartz	Top Plate
2100-00007		101980/1016783	Quartz	Bottom Plate (Combined Parts)
2100-00008		2301700		TUBE, CERAMIC
2100-00009		2301856		RING, CERAMIC, ASIQ

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Last updated: September 2011