- Acid / wet benches
- Dryers
- CMP

- Metrology
     • Particle counter
     • Film measurements
- Track systems
- Aligners / steppers

- Etch Tools
     • Metals
     • Dielectrics
       (SiO2, nitrides, spacers, TEOS, passivation layers, SACs. trenches, vias)
     • Interconnects (doped / undoped poly, Silicides, salicides, W plugs, nitride
- Deposition tools
     • CVD
     • PVD
     • Sputters
     • Evaporators
     • RTP / Furnace
- Ash / Pr strip tools
- Implant tools