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| EESI PART # |
Compare to
OEM PART # |
SYSTEM |
DESCRIPTION |
|
2000-00001 |
37-221-001 |
Tegal 1903E |
Upper Electrode |
|
2000-00002 |
37-221-003 |
Tegal 1903E |
Upper Electrode |
|
2000-00003 |
40-788-616 |
Tegal 901E |
Centering ESC 6" Bnded Genhre |
|
2000-00004 |
39-680-003 |
|
Electrode Conehead |
|
2000-00005 |
40-140-001 |
|
RING INSUL CER |
|
2000-00006 |
40-140-003 |
|
RING INSUL CER 99.5 |
|
2000-00007 |
40-395-001 |
|
RING, FLAT 6" CERAMIC |
|
2000-00008 |
40-395-001 |
|
RING 6" CASTELLATED W/ FLAT CUTAWAY |
|
2000-00009 |
40-395-002 |
|
Ring, Ceramic, 125C, Castellated |
|
2000-00010 |
40-395-003 |
|
RING 4" CASTELLATED W/ FLAT CUTAWAY |
|
2000-00011 |
40-575-003-C |
|
Ring, Ceramic Nest, Flat Ring |
|
2000-00012 |
40-576-003-C |
|
Ring Ceramic Focus, Castellated |
|
2000-00013 |
39-344-002 |
Tegal 901 |
Showerhead |
2000-00014 |
40-395-001 |
|
|
2000-00015 |
40-788-616 |
|
|
2000-00016 |
40-869-002 |
|
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