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Parts & Logistics Services - Novellus 

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EESI PART # Compare to
OEM PART #
MATERIAL DESCRIPTION

2300-00001

15-00699

Sapphire

Clamp for Concept I/II

2300-00002

15-054296

Sapphire

Rod Sapphire

2300-00003

15-110411-00

Sapphire

Window Sapphire

2300-00004

15-154277-00
Sph 18487R6

 

Rod Sapphire

2300-00005

15-00457-00

Nickel

Screw

2300-00006

15-108174-00

 

Cup

2300-00007

15-114331-00

 

Screw

2300-00008

15-00399-00

Nickel

Screw 200 (0.5)

2300-00009

15-08386-00

Nickel

Washer #10 Nickel

2300-00010

15-00721-00

Nickel

Nickel Bolt Screw

2300-00011

16-033932-00

6061 Plate Stock

150mm Showerhead

2300-00012

02-00343-01

 

Harness Assembly, Sensor, 25.5"

2300-00013

02-00343-02

 

Harness Assembly, Sensor, 12.0"

2300-00014

02-00343-03

 

Harness Assembly, Sensor, 17.5"

2300-00015

02-00343-04

 

Harness Assembly, Sensor, 26.5"

2300-00016

02-00397-00

 

Harness Assembly, Sensor 26.5"

2300-00017

10-00072-00

 

Insulator, Gas Distribution

2300-00018

15-00027-00

 

Guide, Nozzle Adjuster

2300-00019

15-00043-02

Ceramic

Adjuster, Ceramic, Gas Plate

2300-00020

15-00229-00

Aluminum

Nut, Hex, 1/2-20, Alum

2300-00021

15-00309-00

 

Hanger, Nozzle, 1.33" (150mm)

2300-00022

15-00309-01

 

Hanger, Nozzle, 1.50" (200mm)

2300-00023

15-000311-00

Nickel

Nut, Cap, 1/4-20, Ni

2300-00024

15-00341-00

Nickel

Screw, 1/4-20 x 1/4, Ni

2300-00025

15-00371-00

Nickel

Nut, Hex, 1/4-20, Ni

2300-00026

15-00372-00

Nickel

Washer, 1/4" Ni

2300-00027

15-00385-00

Nickel

Nut, 10-32 Ni

2300-00028

15-00386-00

Nickel

Washer, Flat, #10, Ni

2300-00029

15-00399-02

Nickel

Screw, Top spindle, Ni

2300-00030

15-00399-03

Nickel

Screw, Top spindle, Ni

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Last updated: April 2008