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Parts & Logistics Services - Novellus 

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EESI PART # Compare to
OEM PART #
MATERIAL DESCRIPTION

2300-00031

15-00399-04

Nickel

Screw, 1.02LG, Top Spindle, Ni

2300-00032

15-00399-05

Nickel

Screw, 1.12LG Top spindle, Ni

2300-00033

15-00475-00

 

Insulator, Gas Feedthrough

2300-00034

15-00483-00

Ceramic

Ring, Heater Hub, Ceramic

2300-00035

15-00484-00

Ceramic

Ring, Heater Centering, Ceramic

2300-00036

15-00485-00

 

Bracket, Paddle, 150mm

2300-00037

15-00553-05

 

Shim, Heater, .005", Flat

2300-00038

15-00553-10

 

Shim, heater, .010", Flat

2300-00039

15-00553-18

 

Shim, Heater, .018", Flat

2300-00040

15-00553-25

 

Shim, Heater, .025", Flat

2300-00041

15-00553-31

 

Shim, Heater, .31", Flat

2300-00042

15-00544-05

 

Shim, Heater, .005", V-Type

2300-00043

15-00544-10

 

Shim, Heater, .010", V-Type

2300-00044

15-00544-18

 

Shim, Heater, .018", V-Type

2300-00045

15-00544-25

 

Shim, Heater, .025", V-type

2300-00046

15-00544-31

 

Shim, Heater, .031" V-Type

2300-00047

15-00558-01

Ceramic

Sleeve, Heater Lead, 2.00", Ceramic

2300-00048

15-00558-02

Ceramic

Sleeve, Heater Lead, 2.75", Ceramic

2300-00049

15-00567-00

Ceramic

Tube, TC, 1/8" ID, Ceramic

2300-00050

15-00578-00

Ceramic

Sleeve, Flanged, AC Feedthrough, Ceramic

2300-00051

15-00653-00

 

Clamp, spindle Hub Mount

2300-00052

15-00654-00

 

Clamp, Rotation Adjustment

2300-00053

15-00680-00

Ceramic

Sleeve, TC Ceramic

2300-00054

15-00684-00

Ceramic

Cap, TC, 1/16" ID, Ceramic

2300-00055

15-00685-00

 

Feedthrough, 3/8: O-Seal, UltraTorr

2300-00056

15-00686-00

Aluminum

Washer, Feedthrough, 1/2" ID, Alum

2300-00057

15-00698-00

Nickel

Fork Screw, Ni

2300-00058

15-00699-01

 

Fork, Finger, 150mm

2300-00059

15-00699-02

 

Fork finger, 200mm

2300-00060

15-007000-00

 

Plate, fork Retainer, Bottom, 200mm

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Last updated: April 2008