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| EESI PART # |
Compare to
OEM PART # |
MATERIAL |
DESCRIPTION |
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2300-00091 |
60-00033-00 |
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Filter, Backfill |
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2300-00092 |
02-00363-00 |
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Kit, Wafer Size with platform, Optical, 200mm |
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2300-00093 |
02-00365-00 |
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Kit, Wafer Size with platform, Optical, 150mm |
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2300-00094 |
05-00221-02 |
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Microcontamination Upgrade |
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2300-00095 |
05-00229-00 |
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Station, Cooling Upgrade |
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2300-00096 |
05-027019-00 |
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External Heated Gate & Throttle Valves |
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2300-00097 |
02-029514-01 |
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Indexer Assy, Left, C2 |
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2300-00098 |
02-029514-02 |
Ceramic |
Indexer Assy, Right C2 |
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2300-00099 |
15-03913-00 |
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Clamp Strap Feedthru |
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2300-00100 |
15-108307-00 |
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Clamp RF Strap Aluminum |
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2300-00101 |
15-253112-00 |
Copper |
Anode, Copper 8" Round |
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