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Parts - Novellus-4 

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EESI PART # Compare to
OEM PART #
MATERIAL TOOL DESCRIPTION

2300-00052

15-00654-00

 

Concept 1

Clamp, Rotation Adjustment

2300-00053

15-00680-00

Ceramic

 

Sleeve, TC Ceramic

2300-00054

15-00684-00

Ceramic

 

Cap, TC, 1/16" ID, Ceramic

2300-00055

15-00685-00

 

Concept 1

Feedthrough, 3/8: O-Seal, UltraTorr

2300-00056

15-00686-00

Aluminum

Concept 1

Washer, Feedthrough, 1/2" ID, Alum

2300-00057

15-00698-00

Nickel

Concept 1

Fork Screw, Ni

2300-00058

15-00699-01

 

Concept 1

Fork, Finger, 150mm

2300-00059

15-00699-02

 

 

Fork finger, 200mm

2300-00060

15-00700-00

 

 

Plate, fork Retainer, Bottom, 200mm

2300-00061

15-00701-00

 

 

Plate, Fork Retainer, Bottom, 150mm

2300-00062

15-00702-00

 

 

Plate, Fork Retainer, Top, 200mm

2300-00063

15-00703-00

 

Concept 1

Plate, Fork Retainer, Top, 150mm

2300-00064

15-00721-00

Nickel

 

Washer, #8, Ni

2300-00065

15-00729-00

 

Concept 1

Clamp, Flat

2300-00066

15-00730-00

 

 

Flange, Keyed (Replaced by 15-032631)

2300-00067

15-00731-00

Ceramic

Concept 1

Bushing, Keyed, Ceramic

2300-00068

15-00742-00

Ceramic

 

Tube, TC Ceramic

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Last updated: May 2102