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Standard PM Service |
- Total of 12 service visits
• Monthly: 12 (-4)
• Quarterly: 4 (-2)
• Bi-annual:
2
- Includes free 160 hours of onsite training
- Total PM time includes:
• Pre-PM hours to prep the tool for PM, including
monitor tests, purge time, vent time, temp ramp down
time
• PM hours needed for parts replacement, re-calibration,
system audit, clean, leak testing
• PM recovery which includes: monitor tets, temp
ramp up, chamber conditioning, wafer cycling
– Extra onsite hours are charged at premium
rate per hour + OT rate + 2 hour minimum per visit
• Next business
day response time
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Premium Service |
- Standard PM Service
• Total of 12 service
visits
• Includes free 160
hours of onsite training)
- Includes limited phone coverage
• 1 hour response
time for 12 hours phone coverage, Mon. to Fri., 8 AM
to 8 PM
• No nights and weekend
coverage
– Includes additional 16 hours per month for
onsite support at NO charge.
- Extra onsite hours over and above the free 16 hours/month
are charged at standard rate per hour + OT rate + 2
hour minimum per visit
• Next business
day response time
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| Customer
Satisfaction Package |
- Standard PM Service
• Total of 12 service
visits
• Includes free 160
hours of onsite training)
- 24/7 phone coverage
• 1 hour response
time , Mon. to Fri., 8 AM to 8 PM
• 3 hours response
time for nights and weekends
– Next day response time for onsite support
– Includes maximum of 34 hours per month for onsite
support at NO charge
- Extra onsite hours over and above the free 34 hours/month
are charged at discounted rate per hour + OT rate +
1hour minimum per visit
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