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| EESI PART # |
Compare to
OEM PART # |
MATERIAL |
SYSTEM |
DESCRIPTION |
|
2600-00001
|
ES1D10-309946-12
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Ring Focus Silicon
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2600-00002
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1810-221471-24
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Silicon
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Showerhead
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2600-00003
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3D05-100010-11
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Quartz
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Shower Head Electrode Cover
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2600-00004
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1D10-101551-11
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Etch
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Baffle Plate 8"
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2600-00005
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1D10-101475-11
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Etch
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Baffle Plate 8"
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2600-00006
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1D10-202988-11
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Etch
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Cover Bellows 8"
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2600-00007
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1D10-202204-12
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Electrode Upper
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2600-00008
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1D10-100670-13
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Electrode Upper
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2600-00009
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1D10-201429-15
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Electrode Upper
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2600-00010
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1D10-100854-15
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Baffle Plate
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2600-00011
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1D10-303124-21
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Shield Depo
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2600-00012
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1D10-303124-21-CT
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Shield Depo
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2600-00013
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1D10-303124-21-CT
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Shield Depo
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2600-00014
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1810-221584-12
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Upper Cooling Plate
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2600-00015
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1810-221471-24
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Silicon
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Electrode, Si 100%
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2600-00016
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1D10-302209-14
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Silicon
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Focus Ring Si
|
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2600-00017
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1D05-300161-11
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Quartz
|
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Support Shield Depo Q-S1
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Last updated: March 2010 |
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