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EESI PART # Compare to
OEM PART #
MATERIAL SYSTEM DESCRIPTION

2600-00018

1D05-200020-11

Quartz

 

Shield Depo QU-A-3

2600-00019

1D05-200033-11

Quartz

 

Support Shield Depo Q-S5

2600-00020

1D05-400022-14

Quartz

 

Window Shield Depo

2600-00021

1D05-300162-70H CT

Quartz

 

Focus Ring Quartz

2600-00022

1D05-300162-11

Quartz

 

Focus Ring Quartz

2600-00023

1D10-407114-11

Kapton

 

Kapton Sheet Window

2600-00024

1D10-406500-11

 

 

Pin Window Peelc B-1

2600-00025

1D10-406499-11

Quartz

DRM 2

Window Depo SAF 0.5 (DRM 2)

2600-00026

1D10-309697-11

Quartz

 

Window DEP P-1 (Hole)

2600-00027

1D05-400022-14

Quartz

DRM 2

Window Shield Depo (DRM 2)

2600-00028

1D10-404285-11

 

 

Pin Adjust

2600-00029

1D10-401935-12

 

DRM 2

Screw Blind A (DRM 2)

2600-00030

1D10-401106-12

 

DRM 2

Plug Thin (DRM 2)

2600-00031

1D10-402088-11

 

DRM 2

Plug SR (DRM 2)

2600-00032

1D10-403927-11

 

DRM 2

Plug Thick (DRM 2)

2600-00033

1D10-302057-11

 

 

JIG Gap

2600-00034

1D10-405256-22

 

88 DD

Screw for Upper Quartz Flat (88DD)

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Last updated: March 2010